This commit adds incremental compilation capabilities to internal TS compiler.
Instead of using "ts.createProgram()" API for compilation step (during deno
startup), "ts.createIncrementalProgram()" API is used instead.
Thanks to TS' ".tsbuildinfo" file that already stores all necessary metadata
for compilation I was able to remove our own invention that is ".graph" file.
".tsbuildinfo" file is stored alongside compiled source and is used to
cache-bust outdated dependencies, facilitated by the "version" field.
The value for "version" field is computed in Rust during loading of module
graph and is basically a hash of the file contents.
Please keep in mind that incremental compilation is only used for initial
compilation (or dynamic imports compilation) - bundling and runtime compiler
APIs haven't been changed at all.
Due to problems with source map I changed compilation settings to inline
source map (inlineSourceMap instead of sourceMap).
